Research Progress of Crystalline Silicon Solar Cells
Muyang Jin
a
The College of Physics and Materials Science, Tianjin Normal University, Tianjin, China
Keywords: Crystalline Silicon, Solar Cells, Metal Oxides, Research Progress.
Abstract: Crystalline silicon solar cells have long dominated the photovoltaic market due to their high conversion
efficiency, stability, and mature industrial chain. This paper systematically reviews the research progress of
crystalline silicon solar cells, with a focus on analyzing the working principles and characteristics of
Passivated Emitter and Rear Contact (PERC) cells, Silicon Heterojunction (SHJ) cells, Tunnel Oxide
Passivated Contact (TOPCon) cells, and Metal Oxide Selective Contact cells. It is found that PERC
significantly reduces recombination losses through localized backside contacts. SHJ achieves full-area
passivation by utilizing amorphous silicon and crystalline silicon heterojunctions. TOPCon combines ultra-
thin oxide layers with doped polycrystalline silicon, offering both high passivation and process compatibility.
Metal oxide selective contact technology simplifies doping processes through band engineering, but interface
stability still needs improvement. Despite the efficiency improvements brought by these technologies, they
still face challenges such as the high purity requirement of n-type silicon substrates for SHJ, the uniformity
control of ultra-thin oxide layers in TOPCon, and the adhesion of metal oxide interfaces. High material costs,
process complexity, long-term reliability, and the consistency of large-scale production remain challenges.
Future research should further balance efficiency and cost, develop new passivation materials, optimize
interface engineering, and promote the efficient transition of technologies to industrialization, to support the
sustainable development of the photovoltaic industry.
1 INTRODUCTION
Crystalline silicon solar cells have a series of
advantages such as high efficiency, good stability and
low cost, and they occupy a dominant position in the
solar cell industry (Xiong & Zhu, 2009). The basic
principle of solar cells is the photovoltaic effect.
When incident light with energy greater than the band
gap width irradiates the p-n junction, electron-hole
pairs are excited in the junction area and the space
near the junction. Under the action of the junction
electric field, the electron-hole pairs separate and drift
to form photogenerated current. Through calculation,
it can be obtained that the theoretical conversion
efficiency limit of the solar spectrum of AM1.5 is
33%, and the corresponding optimal band gap is 1.4
eV.
Since the first single-crystal silicon solar cell with
an efficiency of 6% was developed by Bell Labs in
1954, crystalline silicon technology has undergone
multiple technological iterations (Zhang et al., 2021).
a
https://orcid.org/0009-0009-2254-941X
In the 1980s, the aluminum back surface field (BSF)
cell increased its efficiency to 17%-18% through a
full aluminum back electrode design. After 2000, the
passivated emitter and rear locally diffused contact
(PERC) cell broke through the efficiency bottleneck
with a rear point contact passivation technology,
achieving a laboratory efficiency of over 24% and
quickly becoming the mainstream commercial
technology. In recent years, silicon heterojunction
(SHJ) and tunnel oxide passivated contact (TOPCon)
technologies have further pushed the laboratory
efficiency above 26%, gradually approaching the
theoretical efficiency limit of crystalline silicon of
29% (Green et al., 2023; Yoshikawa et al., 2017;
Feldmann et al., 2019). Currently, high-efficiency
new crystalline silicon solar cells mainly include
passivated emitter solar cells, silicon heterojunction
solar cells, tunnel oxide passivated contact solar cells,
and metal oxide selective contact solar cells.
However, how to continuously improve
efficiency through material innovation and structural
optimization, while reducing manufacturing costs and
Jin, M.
Research Progress of Crystalline Silicon Solar Cells.
DOI: 10.5220/0013828900004708
Paper published under CC license (CC BY-NC-ND 4.0)
In Proceedings of the 2nd International Conference on Innovations in Applied Mathematics, Physics, and Astronomy (IAMPA 2025), pages 529-533
ISBN: 978-989-758-774-0
Proceedings Copyright © 2025 by SCITEPRESS Science and Technology Publications, Lda.
529
ensuring long-term reliability, remains the core
challenge in current research. This article mainly
introduces the recent application research progress of
crystalline silicon solar cells. The aim is to focus on
the core principles, efficiency improvement strategies,
and industrialization bottlenecks of PERC, SHJ,
TOPCon, and metal oxide selective contact
technologies.
2 CHARACTERISTICS OF
CRYSTALLINE SILICON
Crystalline silicon is an indirect bandgap
semiconductor with a bandgap of 1.12 eV, which is
close to the optimal bandgap of 1.4 eV. The
theoretical conversion efficiency limit of its cells is
29% (Zhang et al., 2021). Among them,
monocrystalline silicon and polycrystalline silicon
are the two main types. Monocrystalline silicon is
composed of a single crystal, with a continuous and
ordered lattice, high carrier mobility, and excellent
photoelectric conversion efficiency. However, its
production cost is relatively high. Polycrystalline
silicon contains multiple grains, with increased
carrier recombination at grain boundaries, resulting in
slightly lower efficiency. However, its production
process is simple and the cost is low, making it
suitable for large-scale application. Both have their
own advantages, respectively meeting the
requirements of high efficiency and cost-
effectiveness.
Furthermore, crystalline silicon has high
mechanical strength and is suitable for large-scale
production. However, it is sensitive to impurities and
requires doping processes to optimize its electrical
properties. For example, n-type silicon with
phosphorus doping and p-type silicon with boron
doping. Typically, single-crystal silicon rods required
for solar cells are prepared using melt pull technology
and suspension zone melting technology.
The development of crystalline silicon solar cell
technology is leading the trend of photovoltaic power
generation. From the perspective of scientific
development, improving the photoelectric conversion
efficiency of crystalline silicon solar cells, reducing
light attenuation, and lowering the cost of power
generation are the directions for the future
development of crystalline silicon solar cells. The
continuous progress in the quality of crystalline
silicon materials and the design of battery structures
will be the key to achieving these goals. (Yang, 2014)
3 HIGH-EFFICIENCY
CRYSTALLINE SILICON
SOLAR CELLS
3.1 Passivated Emitters Solar Cell
The Passivated Emitters Solar Cell (PESC) was
proposed in 1985. The structure of the cell is shown
in Figure 1.
Figure 1: PESC solar cell structure(Xiong & Zhu, 2009)
Passivated emitter and rear local contact (PERC)
cells use back-point contact instead of the entire
aluminum rear field. The recombination on the back
surface decreases with the reduction of the back
electrode area, but the existence of "edge effect"
makes the recombination larger in small-pitch and
small-contact-point patterns under the same electrode
area ratio (Shen & Li, 2014).
Passivated emitter and rear surface localized
diffusion (PERL) cells are representative of high-
efficiency crystalline silicon cells. The substrate
material of this cell is a single-crystal silicon wafer
fabricated by zone melting, with low resistivity, p-
type boron doping, (100) crystal orientation, a
diameter of 5 , and a thickness of 280μm, and
double-sided polished (Li et al., 2019). Its core lies in
reducing carrier recombination through surface
passivation technology and combining selective
doping to improve contact performance. The front of
the PERL cell adopts a "inverted pyramid" textured
structure, reducing light reflection to below 5%, as
shown in Figure 2.
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Figure 2: PERL battery structure(Zhang et al., 2021)
The passivated emitter and rear surface full
diffusion (PERT) cell structure retains the
characteristics of PERL while adding a light boron
diffusion layer along the entire rear surface of the cell,
providing a low-resistance path. However, PESC
cells still have limitations such as complex high-
temperature processes, difficulties in fully
passivating metal oxides and silicon interface defects,
material stability affected by the environment, and
difficulties in controlling large-area uniformity,
which restrict their industrial application.
3.2 Silicon Heterojunction Solar Cells
In 1991, Sanyo Corporation of Japan first proposed a
structure that combines monocrystalline silicon and
amorphous silicon films and inserts a thin intrinsic
layer in the middle, namely the silicon-based hetero
junction solar cell SHJ (silicon hetero junction) with
an intrinsic layer, as shown in Figure 3.
Figure 3: SHJ battery structure(Zhang et al., 2021)
SHJ batteries have the advantages of full-area
passivation characteristics, low-temperature process
compatibility, and double-sided power generation.
By using high-quality N-type silicon substrates, both
bulk recombination and interface recombination of
the battery have been effectively controlled. As a
result, the open-circuit voltage of SHJ batteries is
much higher than that of conventional batteries, and
a higher photoelectric conversion efficiency can be
achieved (Li et al.,2019). In addition, the temperature
rise coefficient of SHJ batteries is low, making them
suitable for high-temperature environments. In recent
years, SHJ batteries have made remarkable progress
in efficiency improvement, process optimization and
industrial application. In 2023, domestic research
teams increased the efficiency to 26.8% by
optimizing the interface passivation and the
transparent conductive oxide (TCO) layer (Li X et
al.,2023).
Despite significant progress, SHJ batteries still
face multiple challenges. For example, high
manufacturing cost, photoinduced attenuation (LID),
and the need for optimization of the TCO layer, etc.
3.3 Tunnel Oxide Passivated Contact
(TOPCon) Solar Cells
The tunneling oxide layer passivation contact
(TOPCon) technology has been a research hotspot in
recent years. Firstly, a layer of ultrathin silicon oxide
is prepared on the back of the battery by chemical
methods, and then a thin layer of doped silicon is
deposited, as shown in Figure 4.
Figure 4: TOPCon solar cell structure(Chen et al., 2019)
According to the doping type of the silicon thin
layer, it is divided into p-TOPCon and n-TOPCon.
Silicon oxide reduces the surface state and lowers the
tunneling resistance. Doped polycrystalline silicon
provides field-induced passivation. Together, the two
form a passivation contact structure, providing good
surface passivation for the back of the silicon wafer
(Fu et al., 2012).
Tunneling oxide passivated contact (TOPCon)
solar cells have advantages such as high passivation
performance, process compatibility, and material
optimization. In recent years, atomic layer deposition
(ALD) technology has been used to prepare uniform
Research Progress of Crystalline Silicon Solar Cells
531
and dense silicon oxide layers with thickness control
accuracy reaching the sub-nanometer level.
Meanwhile, the in-situ doping of polycrystalline
silicon technology has improved the carrier mobility
(Ding et al.,2021). In 2023, a Chinese research team
further increased the efficiency to 26.5% by
optimizing the doping concentration of polysilicon
and the interface passivation process (Wang et
al.,2023). The TOPCon structure combines excellent
surface passivation effect with low contact electricity.
Its process is compatible with existing production
lines and is regarded as the mainstream direction of
the next-generation high-efficiency batteries.
With the advancement of technology, there are
still some challenges. For instance, enhancing the
uniformity of the oxide layer, improving the doping
process of polysilicon, and controlling costs, etc.
3.4 Selective Contact of Metal Oxides
Metal oxides achieve efficient and stable selective
carrier transport through band engineering, interface
passivation and optical synergy. Efficient carrier
selective contact is the key to improving the
efficiency of solar cells, but heavy doping can have
adverse effects on the open-circuit voltage, short-
circuit current and blue light response of the cells.
The selective contact technology of metal oxides
achieves efficient separation and collection of carriers
through band engineering. Transition metal oxides
(MoOx, WOx, V2Ox, CrOx, CuOx), graphene,
carbon nanotubes, etc. All materials with high work
functions and hole transport capabilities can be
attempted as hole transport layers (HTL), which can
passivate the interface and reduce the contact
resistance (Yu,2019). The core of the selective
contact technology of metal oxides lies in material
innovation and the improvement of interface stability.
Take MoO₃ as an example. As a hole transport layer,
it can replace the traditional doping process, simplify
the production steps and improve the mechanical
reliability of the components. Studies have shown
that MoO₃ has a wide band gap (3.0-3.6 eV) and a
high work function (5.3-5.7 eV), which enables it to
exhibit excellent hole selectivity in perovskite and
silicon heterojunction solar cells (Wang et al., 2019).
However, the interface adhesion and long-term
stability still need to be further optimized.
4 DEVELOPMENT DIRECTIONS
Passivated emitter batteries, as the current
mainstream technology, have an efficiency close to
the industrialization limit of 24%. In the future, the
focus will be on suppressing photoinduced decay
(LID) and further reducing costs. The development of
new hydrogen passivation processes (such as laser-
assisted hydrogen injection) can reduce the center
density of boron-oxygen recombination and extend
the service life of components (Chen Z et al.,2021).
The future of silicon heterojunction cells (SHJ)
lies in cost reduction, efficiency improvement and
enhanced adaptability to multiple scenarios. The cost
can be reduced by adopting low-purity N-type
silicon-based and amorphous silicon coating process
optimization (Masuo et al.,2022). SHJ and perovskite
tandem technology demonstrated an efficiency
potential of over 30%. In 2023, the research team
achieved a laboratory efficiency of 28.5% through
interface band engineering (Al-Ashouri et al.,2020)
The development direction of tunneling oxide
passivated contact cells (TOPCon) lies in process
simplification and breaking through the efficiency
limit. Research in 2022 showed that double-sided
passivated contact could increase laboratory
efficiency to 26.8%(Wang et al.,2022). The core of
selective contact technology for metal oxides lies in
material innovation and the improvement of interface
stability, reducing carrier recombination by
optimizing the band structure and interface
passivation. In recent years, the contact technology of
undoped metal oxides has become a research hotspot.
For example, the WO3 layers prepared by the all-
solution method not only exhibit excellent hole
selectivity and high light transmittance, but also can
avoid the high-temperature doping process,
significantly simplify the preparation process and
reduce the production cost (Zhang et al., 2022). In
addition, new binary oxides and ternary oxides (such
as MoOx, VOx and NiOx) have achieved battery
efficiency of more than 20% through band regulation,
while the application of atomic layer deposition
technology (ALD) has further enhanced the accuracy
of interface passivation. In the future, the
development of metal oxide materials that can be
processed at low temperatures and are
environmentally stable will become the key to
promoting industrialization.
5 CONCLUSION
Crystalline silicon solar cells enhance their
conversion efficiency by reducing the reflection of
incident light by the cells and minimizing the
recombination loss of photogenerated carriers within
the cells. On this basis, solar cells have developed
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types such as passivated emitter cells, silicon
heterojunction solar cells, and TOPCon solar cells.
Through passivation optimization, structural
innovation and material engineering, the laboratory
efficiency has been pushed up to 26%-28%.
Despite significant progress, there are still
challenges such as the balance between cost and
efficiency, material and process innovation, and
consistency in large-scale production. Selective
contact of undoped metal oxides has become a new
development direction. PERC is limited by
photoinduced attenuation and the reliability of the
thinning process. SHJ needs to reduce the cost of N-
type silicon-based coatings and the complexity of
amorphous silicon coating. TOPCon needs to solve
the uniformity of the oxide layer and the accuracy of
the doping process. Metal oxide technology needs to
break through interface stability and consistency in
scale.
By breaking through the efficiency limit through
layering technology, green manufacturing and
intelligent process innovation have become new
development directions. Through multi-technology
collaborative innovation and vertical integration of
the industrial chain, crystalline silicon cells are
expected to achieve a balance among efficiency, cost
and sustainability, accelerating the progress of the
global photovoltaic industry.
REFERENCES
Al-Ashouri, A., Köhnen, E., Li, B., Magomedov, A.,
Hempel, H., Caprioglio, P., ... & Albrecht, S. 2020.
Monolithic perovskite/silicon tandem solar cell with>
29% efficiency by enhanced hole extraction. Science,
370(6522), 1300-1309.Chen, J., Zhao, S., Gao, T., 2019.
Latest Progress and Development Trends of High-
Efficiency Monocrystalline Silicon Solar Cells.
Materials Review, 33(1), 110-116.
Ding, K., Aeberhard, U., Bivour, M., Köhler, M., Hermle,
M., Glunz, S. W., 2021. In-situ doped poly-Si for high-
performance TOPCon solar cells. IEEE Journal of
Photovoltaics, 11(1), 2-8.
Feldmann, F., Simon, M., Bivour, M., Reichel, C., Hermle,
M., Glunz, S. W., 2019. Tunnel oxide passivated
contacts as key technology for high-efficiency silicon
solar cells. Nature Energy, 4(10), 884-891.
Fu, M., Yuan, P., Fan, L., 2012. Performance Analysis of
Several High-Efficiency Crystalline Silicon Solar Cells.
Materials Review, 5(1), 1-5.
Green, M., Dunlop, E., Hohl-Ebinger, J., Yoshita, M.,
Kopidakis, N., Hao, X., 2023. Solar cell efficiency
tables (Version 62). Progress in Photovoltaics, 31(7),
651-663.
Li, X., Zhang, C., Wang, Z., Shen, W., 2023. 26.8%
efficiency silicon heterojunction solar cell via advanced
interface passivation. Advanced Energy Materials,
13(5), 2203015.
Li, Z., Yang, L., Shen, W., 2019. New Progress in Silicon-
Based Heterojunction Solar Cells. Progress in Physics,
39(1), 1-22.
Shen, W., Li, Z., 2014. Physics and Devices of Silicon-
Based Heterojunction Solar Cells. Beijing: Science
Press, 11-204.
Wang, Y., Zhang, C., Shen, W., 2022. 26.8% efficiency
bifacial TOPCon solar cell. Nature Energy, 7(2), 123-
130.
Wang, Y., Zhang, C., Shen, W., 2023. 26.5% efficiency
TOPCon solar cell via interface engineering. Advanced
Energy Materials, 13(15), 2203001.
Xiong, S., Zhu, M., 2009. Fundamentals and Applications
of Solar Cells. Beijing: Science Press, 67-149.
Yang, S., 2014. Research on Light-Induced Degradation of
Crystalline Silicon Solar Cell Efficiency. Hebei
University of Technology.
Yoshikawa, K., Kawasaki, H., Yoshida, W., Irie, T.,
Konishi, K., Nakano, K., Uto, T., Adachi, D.,
Kanematsu, M., Uzu, H., Yamamoto, K., 2017.
Exceeding conversion efficiency of 26% by
heterojunction interdigitated back contact solar cell.
Nature Energy, 2(5), 17032.
Yu, J., 2019. Research on Silicon-Based Heterojunction
Solar Cells with Metal Oxides as Carrier Selective
Transport Layers. University of Chinese Academy of
Sciences.
Zhang, Q., Wang, Z., Shen, W., 2022. Solution-processed
WO₃ for low-cost carrier-selective contacts. Advanced
Science, 9(5), 2104562.
Zhang, Y., Chen, X., Zhou, Z., 2021. Research Progress of
Crystalline Silicon Solar Cells. Acta Energiae Solaris
Sinica, 42(10), 49-60.
Research Progress of Crystalline Silicon Solar Cells
533