Angular Distribution of Sputtered CuxAly Alloys: Simulated Study

K. Bria, M. Ait El Fqih

2021

Abstract

Simulation angular distribution of sputtered Cu and Al particles from CuxAl00-x alloys are studied. The simulation was performed in the computer SRIM-code. For a large number of incident ions, the computer counts the number of sputtered atoms emitted in the solid angle corresponding to each simulated square side. The tendency of angular distribution is an over-cosine, which may be associated with non-compensated scattering of ejected particles by surface atoms when exiting a solid.

Paper Citation

in Harvard Style

Bria K. and Ait El Fqih M. (2021). Angular Distribution of Sputtered CuxAly Alloys: Simulated Study. In Proceedings of the 2nd International Conference on Big Data, Modelling and Machine Learning - Volume 1: BML, ISBN 978-989-758-559-3, pages 471-473. DOI: 10.5220/0010736700003101

in Bibtex Style

@conference{bml21,
author={K. Bria and M. Ait El Fqih},
title={Angular Distribution of Sputtered CuxAly Alloys: Simulated Study},
booktitle={Proceedings of the 2nd International Conference on Big Data, Modelling and Machine Learning - Volume 1: BML,},
year={2021},
pages={471-473},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0010736700003101},
isbn={978-989-758-559-3},
}

in EndNote Style

TY - CONF

JO - Proceedings of the 2nd International Conference on Big Data, Modelling and Machine Learning - Volume 1: BML,
TI - Angular Distribution of Sputtered CuxAly Alloys: Simulated Study
SN - 978-989-758-559-3
AU - Bria K.
AU - Ait El Fqih M.
PY - 2021
SP - 471
EP - 473
DO - 10.5220/0010736700003101