Authors:
Jun Watanabe
;
Jun-ya Iwasaki
and
Toshiyuki Horiuchi
Affiliation:
Tokyo Denki University, Japan
Keyword(s):
Light-Emitting Diode, Squared Optical Fiber, Projection Exposure, Biodevice, Cell Array, Micro-Fluidic Path.
Related
Ontology
Subjects/Areas/Topics:
Biomedical Engineering
;
Biomedical Instrumentation
;
Biomedical Instruments and Devices
;
Hardware
;
Low-Power Design
;
MEMS
;
Sensor Networks
Abstract:
A new low-cost lithography system convenient for fabricating biodevices was developed. Using the new
system, various patterns of cell arrays, chamber arrays, flow paths of micro-fluidic devices, and others were
easily printed without preparing any reticles or masks. In the system, light-emitting diodes (LEDs) were used
as exposure sources and squared optical fibers arrayed in a 10×10 matrix were used as the combination of a
secondary light source and a reticle. Light rays emitted from each LED were individually led to each fiber,
and bright or dark of each LED was assigned by a personal computer. As a result, it became possible to print
arbitrary patterns without preparing any reticles or masks. In addition to the ordinary patterning using various
lightening maps of LEDs and their stitching, scan exposure was also tried. When bright images of optical
fiber ends were scanned on a resist film by moving the wafer stage, long patterns appropriate for micro fluidic
paths were ver
y smoothly formed.
(More)