Authors:
Toshiyuki Horiuchi
;
Hiroshi Sakabe
and
Hiroshi Kobayashi
Affiliation:
Tokyo Denki University, Japan
Keyword(s):
Stent, Laser Scan Lithography, Slit Pattern, Etching, Stainless Steel Pipe.
Related
Ontology
Subjects/Areas/Topics:
Biomechanical Devices
;
Biomedical Engineering
;
Biomedical Instruments and Devices
;
Hardware
;
MEMS
;
Sensor Networks
Abstract:
Precise slit patterns were delineated on fine stainless steel pipes with an outer diameter of 100 μm. The aim
of the research is to clarify the feasibility of fabricating stents with diameters of less than 1 mm by
delineating precise multi-slit patterns on fine pipes. Using a laser scan exposure system, slit patterns with
widths of 11-29 μm were successfully delineated as fundamental stent patterns. At first, the exposure shutter
was opened just before the specimen was scanned. However, swells appeared at the pattern ends. For this
reason, exposure program was changed to open the shutter after starting the specimen scan. As a result,
swells were completely diminished. In addition to simple parallel slit patterns, alternatively positioned
parallel slit patterns were homogeneously delineated. Because the delineation speed of the investigated
method is not fast, an idea of scan projection lithography was also proposed. It is feasible to fabricate stents
if the pipes are etched using the
resist patterns as etching masks continuing to the lithography.
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