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Authors: Arthur M. D. Shr 1 ; Alan Liu 1 and Peter P. Chen 2

Affiliations: 1 National Chung Cheng University, Taiwan ; 2 Louisiana State University, United States

Keyword(s): Load Balancing Scheduling, Dedicated Machine Constraint, Least Slack, Resource Schedule and Execution Matrix, Semiconductor Manufacturing.

Related Ontology Subjects/Areas/Topics: Applications of Expert Systems ; Artificial Intelligence and Decision Support Systems ; Enterprise Information Systems ; Industrial Applications of Artificial Intelligence

Abstract: The constraint of having a dedicated machine for photolithography process in semiconductor manufacturing is one of the new challenges introduced in photolithography machinery due to natural bias. With this constraint, the wafers passing through each photolithography process have to be processed on the same machine. The purpose of the limitation is to prevent the impact of natural bias. However, many scheduling polices or modeling methods proposed by previous research for the semiconductor manufacturing production have not discussed the dedicated machine constraint. In this paper, we propose the Load Balancing (LB) scheduling approach based on a Resource Schedule and Execution Matrix (RSEM) to tackle this constraint. The LB scheduling approach is to schedule each wafer lot at the first photolithography stage to a suitable machine according to the load balancing factors among machines. We describe the algorithm of the proposed LB scheduling approach and RSEM in the paper. We also prese nt an example to demonstrate our approach and the result of the simulations to validate our approach. (More)

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Paper citation in several formats:
M. D. Shr, A.; Liu, A. and P. Chen, P. (2006). A LOAD BALANCING SCHEDULING APPROACH FOR DEDICATED MACHINE CONSTRAINT. In Proceedings of the Eighth International Conference on Enterprise Information Systems - Volume 1: ICEIS; ISBN 978-972-8865-42-9; ISSN 2184-4992, SciTePress, pages 170-175. DOI: 10.5220/0002454801700175

@conference{iceis06,
author={Arthur {M. D. Shr}. and Alan Liu. and Peter {P. Chen}.},
title={A LOAD BALANCING SCHEDULING APPROACH FOR DEDICATED MACHINE CONSTRAINT},
booktitle={Proceedings of the Eighth International Conference on Enterprise Information Systems - Volume 1: ICEIS},
year={2006},
pages={170-175},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0002454801700175},
isbn={978-972-8865-42-9},
issn={2184-4992},
}

TY - CONF

JO - Proceedings of the Eighth International Conference on Enterprise Information Systems - Volume 1: ICEIS
TI - A LOAD BALANCING SCHEDULING APPROACH FOR DEDICATED MACHINE CONSTRAINT
SN - 978-972-8865-42-9
IS - 2184-4992
AU - M. D. Shr, A.
AU - Liu, A.
AU - P. Chen, P.
PY - 2006
SP - 170
EP - 175
DO - 10.5220/0002454801700175
PB - SciTePress