Author:
Udo Schwalke
Affiliation:
Institute for Semiconductor Technology and Nanelectronics, Darmstadt University of Technology, Germany
Keyword(s):
Carbon nanotube (CNT), carbon nanotube field-effect sensor (CNTFES), carbon nanotube field-effect transistor (CNTFET), functionalization, virus-detection, integrated circuit, CMOS, hybrid CNT-CMOS integrated circuit, atomic force microscopy (AFM).
Related
Ontology
Subjects/Areas/Topics:
Biomedical Engineering
;
Biomedical Instruments and Devices
;
Biomedical Sensors
;
Emerging Technologies
;
Nanotechnologies
;
Telecommunications
;
Wireless and Mobile Technologies
;
Wireless Information Networks and Systems
Abstract:
In this position paper we propose a novel method for the realization of carbon nanotube field-effect sensors (CNTFESs) which will most likely have a strong impact on the next-generation of sensors. CNTFESs are ideally suitable for biomedical sensor applications due to their excellent inherent properties such as ultra small size, high specific surface area and extremely high sensitivity. CNTFESs are based on carbon nanotube field-effect transistors (CNTFETs) which are optimized for sensor applications. We have succeeded to develop a simple, reproducible fabrication process to grow individual CNTs and CNT-networks directly within the specified device area. No tedious manual manipulation and alignment of the CNTs is necessary. Electrical results of the fabricated fully functional CNTFETs are presented and the use of these devices as single-walled CNT-based field-effect controlled sensors for virus detection is discussed.