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Authors: Il-Gyo Chong 1 ; Chenbo Zhu 2 and Yanfeng Wu 3

Affiliations: 1 Samsung Electronics, Korea, Republic of ; 2 Zhejiang University of Technology, China ; 3 Fudan University, China

ISBN: 978-989-758-075-8

Keyword(s): Semiconductor Manufacturing Line, Turn around Time (TAT), Data Mining, Variable Selection, Variable Importance in the Projection (VIP) Scores, Partial Least Squares Regression.

Related Ontology Subjects/Areas/Topics: Data Mining and Business Analytics ; Industrial Engineering ; Methodologies and Technologies ; Operational Research

Abstract: Variation reduction of Turn Around Time (TAT) in a manufacturing line is one of the important issues for line optimization. In a manufacturing line with many sequential process steps such as semiconductor fabrication, it is not easy to find the root causes of the TAT variation because (1) there might be a big time gap (more than 30 days) between cause and effect, and (2) there are so many machines (or tools) related with a process. The purpose of this paper is to propose a data mining based method to identify the root cause of TAT variation. We also aim to validate the performance of the proposed method through a simulation study.

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Paper citation in several formats:
Chong, I.; Zhu, C. and Wu, Y. (2015). Data Mining Analysis of Turn around Time Variation in a Semiconductor Manufacturing Line.In Proceedings of the International Conference on Operations Research and Enterprise Systems - Volume 1: ICORES, ISBN 978-989-758-075-8, pages 185-189. DOI: 10.5220/0005253301850189

@conference{icores15,
author={Il{-}Gyo Chong. and Chenbo Zhu. and Yanfeng Wu.},
title={Data Mining Analysis of Turn around Time Variation in a Semiconductor Manufacturing Line},
booktitle={Proceedings of the International Conference on Operations Research and Enterprise Systems - Volume 1: ICORES,},
year={2015},
pages={185-189},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005253301850189},
isbn={978-989-758-075-8},
}

TY - CONF

JO - Proceedings of the International Conference on Operations Research and Enterprise Systems - Volume 1: ICORES,
TI - Data Mining Analysis of Turn around Time Variation in a Semiconductor Manufacturing Line
SN - 978-989-758-075-8
AU - Chong, I.
AU - Zhu, C.
AU - Wu, Y.
PY - 2015
SP - 185
EP - 189
DO - 10.5220/0005253301850189

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