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Authors: Xin Zhao 1 and Schmidt J. Dominik 2

Affiliations: 1 Sichuan University and International Technological University, China ; 2 International Technological University, United States

Keyword(s): Micro-electro-mechanical Systems, Long-Wave Infrared, Tunable Fabry-Pérot Filter, Glucose Sensor.

Related Ontology Subjects/Areas/Topics: Biomedical Engineering ; Biomedical Instruments and Devices ; Biomedical Sensors ; Devices ; Hardware ; Health Monitoring Devices ; Human-Computer Interaction ; MEMS ; Microelectronics ; Physiological Computing Systems ; Sensor Networks

Abstract: This paper presents a Tunable MEMS Fabry-Pérot (FP) filter for the application of optical glucose sensor in Long-Wave Infrared (LWIR) range. The structure design, simulation, fabrication process and testing system are reported. The spectral wavelength tuning range from 10.9 μm to 12.19 μm was designed for the transmission peak which is related to the glucose concentration. A tuning distance between top and bottom reflector of 2.25µm has been achieved, while maintaining a relatively low tuning voltage of 20V. The Tunable FP filter is the core part of glucose sensor and has other applications in Bio-sensor, hyperspectral imaging and tunable lasers, etc.

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Paper citation in several formats:
Zhao, X. and J. Dominik, S. (2014). Tunable Fabry-Pérot Filter for Optical Glucose Monitoring. In Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2014) - BIODEVICES; ISBN 978-989-758-013-0; ISSN 2184-4305, SciTePress, pages 171-175. DOI: 10.5220/0004871101710175

@conference{biodevices14,
author={Xin Zhao. and Schmidt {J. Dominik}.},
title={Tunable Fabry-Pérot Filter for Optical Glucose Monitoring},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2014) - BIODEVICES},
year={2014},
pages={171-175},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0004871101710175},
isbn={978-989-758-013-0},
issn={2184-4305},
}

TY - CONF

JO - Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2014) - BIODEVICES
TI - Tunable Fabry-Pérot Filter for Optical Glucose Monitoring
SN - 978-989-758-013-0
IS - 2184-4305
AU - Zhao, X.
AU - J. Dominik, S.
PY - 2014
SP - 171
EP - 175
DO - 10.5220/0004871101710175
PB - SciTePress