Authors:
Toshiyuki Horiuchi
;
Shinichiro Ohtsuka
;
Miyu Ozaki
;
Ryota Ando
and
Kazunari Hiraki
Affiliation:
Tokyo Denki University, Japan
Keyword(s):
Air-pressure dispenser, Micro-fluidic device, Micro-fluidic mixer, Micro-beaker, Direct writing, Image reverse, Thick resist, Flow path.
Related
Ontology
Subjects/Areas/Topics:
Biomechanical Devices
;
Biomedical Engineering
;
Biomedical Instruments and Devices
Abstract:
A novel method was developed to easily fabricate micro-fluidic devices with a low cost. It will be especially useful at preliminary research stages. In the new method, inexpensive commercial air-pressure dispenser was used. Adopting originally developed “wire nozzles”, it was verified that fine resist patterns with widths down to 50 μm were successfully delineated. However, because patterns have to be delineated connecting simple line patterns, it was difficult to delineate trench or hole patterns by painting out a large area. Moreover, sidewalls of the delineated patterns were not sharp. For this reason, easy image-reverse process was thought out. In the novel process, opaque liquid patterns were delineated using the dispenser on a thick negative resist film coated on a substrate, and the resist film was exposed to flood exposure light. As a result, the resist was sensitized except under the opaque liquid patterns. Therefore, trench or hole patterns corresponding to the opaque liqui
d pattern shapes were obtained after developing the resist. Replicated thick resist patterns have sharply-cut sidewalls, and will be durable for micro-fluidic paths or vessels of bio-devices.
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