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Authors: Jose A. Miguel ; Y. Lechuga ; M. Martinez and J. R. Berrazueta

Affiliation: University of Cantabria, Spain

Keyword(s): MEMS Testing, Fault Injection, Biomedical Transducers, Implantable Biomedical Devices, Cardiology.

Related Ontology Subjects/Areas/Topics: Biomechanical Devices ; Biomedical Engineering ; Biomedical Instruments and Devices ; Biomedical Sensors ; Hardware ; Implantable Electronics ; MEMS ; Sensor Networks

Abstract: The aim of this work is to analyse the fault-injection problem of implantable capacitive micro-electro-mechanical pressure sensors intended to be used as a part of smart stents for in-stent restenosis monitoring. The development of accurate fault models is mandatory in order to create a Design-for-Test methodology compatible with MEMS-based sensors as well as with its related CMOS electronic circuitry. Rigorous behavioural descriptions of both circular and square-shaped fault-free pressure sensors can be obtained from analytical expressions and numerical approximations. However, the deflection vs. pressure response of faulty sensors, suffering from contamination-based defects growth during the fabrication process, require the use of finite-elements analysis to be modelled, allowing the fulfilment of a realistic fault model library.


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Paper citation in several formats:
A. Miguel, J.; Lechuga, Y.; Martinez, M. and R. Berrazueta, J. (2015). Fault Modeling of Implantable MEMS Sensors. In Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2015) - BIODEVICES; ISBN 978-989-758-071-0; ISSN 2184-4305, SciTePress, pages 162-167. DOI: 10.5220/0005278801620167

author={Jose {A. Miguel}. and Y. Lechuga. and M. Martinez. and J. {R. Berrazueta}.},
title={Fault Modeling of Implantable MEMS Sensors},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2015) - BIODEVICES},


JO - Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2015) - BIODEVICES
TI - Fault Modeling of Implantable MEMS Sensors
SN - 978-989-758-071-0
IS - 2184-4305
AU - A. Miguel, J.
AU - Lechuga, Y.
AU - Martinez, M.
AU - R. Berrazueta, J.
PY - 2015
SP - 162
EP - 167
DO - 10.5220/0005278801620167
PB - SciTePress