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Authors: Henna Heinilä ; Maunu Mäntylä and Pekka Heino

Affiliation: Institute of Electronics, Tampere University of Technology, Finland

ISBN: 978-989-8111- 17-3

ISSN: 2184-4305

Keyword(s): Parylene, Quartz Crystal Microbalance, Biomedical Coating.

Related Ontology Subjects/Areas/Topics: Biomaterials ; Biomedical Engineering ; Biomedical Instruments and Devices

Abstract: At present, the exact final thickness of parylene coating is difficult to specify in the beginning of the coating process since the parylene thickness is a function of many components. The elements that control the thickness are substrate surface area in a vacuum chamber, program parameters, and amount of dimer charge. This paper describes a method for measuring parylene coating thickness using quartz crystal microbalance. The thickness is measured by an oscillation frequency change of quartz crystal as parylene deposites on the quartz crystal plate. These results can be used for specifying the parylene thickness real-time during the coating process.

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Paper citation in several formats:
Heinilä, H.; Mäntylä, M. and Heino, P. (2008). METHOD FOR MEASURING PARYLENE THICKNESS USING QUARTZ CRYSTAL MICROBALANCE.In Proceedings of the First International Conference on Biomedical Electronics and Devices - Volume 2: BIODEVICES, (BIOSTEC 2008) ISBN 978-989-8111- 17-3, pages 222-226. DOI: 10.5220/0001056102220226

@conference{biodevices08,
author={Henna Heinilä and Maunu Mäntylä and Pekka Heino},
title={METHOD FOR MEASURING PARYLENE THICKNESS USING QUARTZ CRYSTAL MICROBALANCE},
booktitle={Proceedings of the First International Conference on Biomedical Electronics and Devices - Volume 2: BIODEVICES, (BIOSTEC 2008)},
year={2008},
pages={222-226},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0001056102220226},
isbn={978-989-8111- 17-3},
}

TY - CONF

JO - Proceedings of the First International Conference on Biomedical Electronics and Devices - Volume 2: BIODEVICES, (BIOSTEC 2008)
TI - METHOD FOR MEASURING PARYLENE THICKNESS USING QUARTZ CRYSTAL MICROBALANCE
SN - 978-989-8111- 17-3
AU - Heinilä, H.
AU - Mäntylä, M.
AU - Heino, P.
PY - 2008
SP - 222
EP - 226
DO - 10.5220/0001056102220226

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