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Author: Christian Dahmen

Affiliation: University of Oldenburg, Germany

ISBN: 978-989-674-000-9

Keyword(s): Image processing, Object tracking, Depth estimation, Focus analysis.

Related Ontology Subjects/Areas/Topics: Image Processing ; Informatics in Control, Automation and Robotics ; Robotics and Automation ; Vision, Recognition and Reconstruction

Abstract: This paper proposes a tracking algorithm for the extraction of threedimensional position data from SEM images. An algorithm based on active contours with region-based minimization is chosen as basis for twodimensional tracking. This algorithm is then augmented by the incorporation of defocus analysis to estimate the out-of-focus displacement of the object. To solve the ambiguity of the out-of-focus displacement, the astigmatism of the SEM images is used. The separate calculation of variances for the rows and columns of the image enables a successful direction estimation. With the information on the direction, the out-of-focus displacement and the working distance of the acquired image, the distance of the object to the electron gun can be calculated. In combination with the twodimensional part of the tracking, a full threedimensional coordinate set is generated. The approach is tested and evaluated using a positioning setup and the principal feasibility is shown.

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Paper citation in several formats:
Dahmen C. and (2009). THREEDIMENSIONAL TRACKING USING OBJECT DEFOCUS - In Twodimensional Scanning Electron Microscope Images.In Proceedings of the 6th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO, ISBN 978-989-674-000-9, pages 72-78. DOI: 10.5220/0002209200720078

@conference{icinco09,
author={Christian Dahmen},
title={THREEDIMENSIONAL TRACKING USING OBJECT DEFOCUS - In Twodimensional Scanning Electron Microscope Images},
booktitle={Proceedings of the 6th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO,},
year={2009},
pages={72-78},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0002209200720078},
isbn={978-989-674-000-9},
}

TY - CONF

JO - Proceedings of the 6th International Conference on Informatics in Control, Automation and Robotics - Volume 1: ICINCO,
TI - THREEDIMENSIONAL TRACKING USING OBJECT DEFOCUS - In Twodimensional Scanning Electron Microscope Images
SN - 978-989-674-000-9
AU - Dahmen, C.
PY - 2009
SP - 72
EP - 78
DO - 10.5220/0002209200720078

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