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Authors: Toshiyuki Horiuchi and Shinpei Yoshino

Affiliation: Tokyo Denki University, Japan

Keyword(s): Micro-fluidic Device, Micro-mixer, Lithography, Thick Resist, Vertical Sidewall, Blue Filter.

Related Ontology Subjects/Areas/Topics: Biomechanical Devices ; Biomedical Engineering ; Biomedical Instruments and Devices ; Hardware ; MEMS ; Sensor Networks

Abstract: Various methods have been proposed for fabricating biochemical, pharmaceutical, and medical micro-fluidic devices. Among them, the new method using groove patterns formed in a thick resist film as the flow paths is promising. Because the flow paths are directly fabricated only using one lithography process, complicated flow paths can be obtained easily and precisely. However, it is often required to prepare an expensive exposure system newly for applying the method to practical fabrications of the devices. For this reason, the effective method has not been sufficiently utilized practically. Here, a very low-cost exposure tool was developed to make a breakthrough. In the new tool, functions were minimized, and limited to indispensable ones. However, because the required pattern widths were in the range of 50-200 μm, flow-path patterns were nicely fabricated. Assembling the fabricated micro-mixer chips with the vessels and lids, it was verified that two liquids were simultaneously inje cted into the mixer paths without leaks. Thus, it was clarified that the new exposure tool was useful. Micro-patterns fabricated using the new simple exposure tool will be useful for developing various micro-fluidic devices. (More)

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Paper citation in several formats:
Horiuchi, T. and Yoshino, S. (2014). Fabrication of Precise Micro-fluidic Devices using a Low-cost and Simple Contact-exposure Tool for Lithography. In Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2014) - BIODEVICES; ISBN 978-989-758-013-0; ISSN 2184-4305, SciTePress, pages 5-11. DOI: 10.5220/0004724900050011

@conference{biodevices14,
author={Toshiyuki Horiuchi. and Shinpei Yoshino.},
title={Fabrication of Precise Micro-fluidic Devices using a Low-cost and Simple Contact-exposure Tool for Lithography},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2014) - BIODEVICES},
year={2014},
pages={5-11},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0004724900050011},
isbn={978-989-758-013-0},
issn={2184-4305},
}

TY - CONF

JO - Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2014) - BIODEVICES
TI - Fabrication of Precise Micro-fluidic Devices using a Low-cost and Simple Contact-exposure Tool for Lithography
SN - 978-989-758-013-0
IS - 2184-4305
AU - Horiuchi, T.
AU - Yoshino, S.
PY - 2014
SP - 5
EP - 11
DO - 10.5220/0004724900050011
PB - SciTePress