An Automatic Vision System using Optical Scanning Mechanism with Near-infrared Optics for Solar Cell Wafer

Gyung-bum Kim

2014

Abstract

In this paper, an automatic vision system based on optical scanning mechanism is developed for solar cell wafer. It consists of optical scanning mechanism with near-infrared(NIR) camera optics, machinery and control system, algorithm of defect detection and software. Optical scanning mechanism is composed of geometrical camera optics and structured hybrid illumination system(SHIS). It is used to inspection of surface defects. Also, NIR camera optics is used for inspection of defects inside solar cell wafer. It is shown that the automatic inspection system give satisfactory performance for micro defects in solar cell wafer.

References

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Paper Citation


in Harvard Style

Kim G. (2014). An Automatic Vision System using Optical Scanning Mechanism with Near-infrared Optics for Solar Cell Wafer . In Proceedings of the 4th International Conference on Pervasive and Embedded Computing and Communication Systems - Volume 1: PECCS, ISBN 978-989-758-000-0, pages 27-30. DOI: 10.5220/0004679200270030


in Bibtex Style

@conference{peccs14,
author={Gyung-bum Kim},
title={An Automatic Vision System using Optical Scanning Mechanism with Near-infrared Optics for Solar Cell Wafer},
booktitle={Proceedings of the 4th International Conference on Pervasive and Embedded Computing and Communication Systems - Volume 1: PECCS,},
year={2014},
pages={27-30},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0004679200270030},
isbn={978-989-758-000-0},
}


in EndNote Style

TY - CONF
JO - Proceedings of the 4th International Conference on Pervasive and Embedded Computing and Communication Systems - Volume 1: PECCS,
TI - An Automatic Vision System using Optical Scanning Mechanism with Near-infrared Optics for Solar Cell Wafer
SN - 978-989-758-000-0
AU - Kim G.
PY - 2014
SP - 27
EP - 30
DO - 10.5220/0004679200270030