
 
structural layers. MEMS can act as sensors or 
actuators, either individually or in arrays, to produce 
effects on a larger scale. 
Currently, there is a large number of different 
MEMS. Non-comprehensive examples are pressure 
and displacement sensors, accelerometers, 
gyroscopes, cantilevers, precision instruments, 
manipulators, micro-relays, micromirrors, thermal, 
chemical, micro-fluidics, etc. Each MEMS device 
requires its own electronic circuitry, based on 
characteristic frequency, load, voltage and current 
levels, noise, etc. For instance, for a capacitive 
accelerometer the resonance frequency ranges in the 
order of tens of kHz, bandwidth of several kHz, 
under a 6 V supply. For an angular quartz sensor, the 
vibration is of some kHz and bandwidth over 50 Hz, 
with voltage over 5 V. Other kinds of MEMS 
require much higher frequency, such as those 
operating in RF. In electrostatic actuators, voltage 
requirements may be tens of volts or more. 
Therefore, treatment should be completely different 
for each particular case.  
Besides the previous consideration, MEMS 
sensors and actuators characteristics variation with 
aging, temperature, humidity or other physical 
phenomena, as well as reliability, raise the need for a 
self-adaptive conditioning systems. 
Therefore, MEMS/NEMS already offer and 
promise more interaction with the environment at 
micro/nano scale. Thus, embedded in computing 
nodes, reduced-size and low-power systems able to 
interact with the environment become feasible.  
MEMS technologies are not CMOS compatible 
in general, so further integration is limited from this 
point of view. Several research efforts in developing 
compatible CMOS MEMS have been done in the 
latest years, as it will be discussed (Baltes H. et al., 
2002; Brand O. et al., 2005). 
1.3  Self-adaptation and Bioinspiration  
Despite technology already offers powerful 
computing and sensing devices, artificial algorithms 
still are limited in the extent of environment 
interaction capabilities, compared with even the 
simpler existing living beings. 
The inspiration more directly related to 
environment perception is the autonomous function 
of the human central nervous system. The human 
autonomous control employs motor neurons to send 
indirect messages to organs at a subconscious level. 
These messages regulate unconscious processes and 
variables such as temperature, breath, heartbeat or 
digestion, among many others. The parallel for 
artificial systems is a network of processors which 
performs the necessary operations at the right time 
without the need of dedicated attention, in the so-
called autonomic computing paradigm (Kephart, J. 
O.; Chess, D. M., 2003). 
Such computing paradigm changes from the 
conventional processing power to another one driven 
by data. Besides the traditional centralized storage, 
access to data from multiple distributed sources 
enable users to access to information when and 
where needed. The main objectives of these 
distributed and autonomous architectures are often 
referred to as self-* properties. Systems able to self-
manage should be self-configuring,  self-healing, 
self-optimizing, and self-protecting and exhibit self-
awareness,  self-situation,  self-monitoring, and self-
adjustment (Dobson, S. et al., 2010). Thus, the 
information they can provide from the physical 
environment they are immersed is essential for those 
systems. 
In addition to the autonomic computation 
proposal, there are many other similar approaches, 
for example Organic Computing (Gudemann, M. et 
al. 2008) Systemic Computation (Bentley, P. J., 
2007) and Æther (Soto, V. J. et al., 2009). 
Due to the power and interconnect limitations, 
increased processor performance is nowadays 
coming more from the increasing computing  
parallelism rather than from clock frequency 
improvements. The nanometer-size cutting-edge 
VLSI devices suffer from great variability and non-
ideal effects. Further, with reduced dimensions, 
cosmic radiation-produced soft errors start to appear 
also at ground level. For these reasons, very serious 
reliability issues arise and a holistic strategy for fault 
tolerance and self-repair is required.  
Because of their nature, bio-inspired neural 
networks promise feasible solutions: they are 
constructed with slow and unreliable elements, they 
are tolerant to manufacturing defects and to noisy 
environments, they are robust in the presence of 
hardware failures, they are not programmed but they 
adapt and self-organize, and they interact with the 
real world. 
Based on studies of the human cortex the fields 
of computer science and cognitive neuroscience 
have been combined from a top-down approach 
(Hawkins J. and Blakeslee S., 2004). It is 
conjectured that the resolution of complex 
perception problems is done by means of few layers 
of neurons, evenly distributed and massively parallel 
working further massively interconnected with direct 
and feedback flows of information. The ability to 
predict is what sets the human intelligence and it is 
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