ANNEALING TEMPERATURE EFFECT ON THE SENSITIVITY OF SIGE NANOWIRE FOR BIO-SENSOR

Kow-Ming Chang, Chu-Feng Chen, Yu-Bin Wang, Chung-Hsien Liu, Jiun-Ming Kuo, Chiung-Hui Lai

2011

Abstract

Nanowire is widely used in biological sensor because it has the high surface-to-volume ratio. Germanium (Ge) would be beneficial to enhance the sensitivity of silicon nanowire for bio-sensor. In this study, we have successfully fabricated the SiGe on Insulator (SGOI) nanowires with different annealing temperature by side-wall spacer technique, respectively. The 3-amino-propyltrime-thoxy-silane (APTS) is used to modify the surface, which can connect the bio-linker. Nanowire is considered as a resistance, and the change of conductance (G) and sensitivity (S) of different samples corresponding to APTS treatment were investigated. As annealing temperature was elevated from 800 to 950℃, the SiGe nanowire exhibited increasing sensitivity in the chemical detection. However, it was noted that degradation of sensitivity was observed as the annealing temperature increases up to 1000℃. This behavior may be associated with the reduction of the Ge concentration at the surface of SiGe nanowire due to high-temperature diffusion of Ge in Si. So, temperature is a key parameter in the annealing process producing two effects: repairs of defects and Ge diffusion. There would be an optimal annealing temperature between 900 and 1000℃.

References

  1. Cui, Y. (2001). Nanowire Nanosensors for Highly Sensitive and Selective Detection of Biological and Chemical Species. Science, 293, 1289-1292.
  2. Li, Z. (2004). Sequence-Specific Label-Free DNA Sensors Based on Silicon Nanowires. Nano Letters, 4(2), 245- 247.
  3. Patolsky, F. (2003). Electrical detection of single viruses. Proc. Natl. Acad. Sci. U.S.A., 101, 14017- 14022.
  4. Solak, H. H. (1999). Exposure of 38 nm period grating patterns with extreme ultraviolet interferometric lithography. Appl. Phys. Lett., 75(15), 2328-2330.
  5. Nemutudi, R. (2001). Modification of a shallow 2DEG by AFM lithography. Microelectronic Engineering, 57, 967-973.
  6. Yan, X. M. (2005). Fabrication of large number density platinum nanowire arrays by size reduction lithography and nanoimprint lithography. Nano Letters, 5(4), 745-748.
  7. Choi, Y. K. (2002). A Spacer Patterning Technology for Nanoscale CMOS. IEET Transactions on Electron Devices, 49(3), 436-441.
  8. Mohanty, P. (2007). Simple vapor-phase synthesis of single-crystalline Ag nanowires and single-nanowire surface-enhanced Raman scattering. J. AM. CHEM. SOC., 129, 9576-9577.
  9. Li, C. (2003). Diameter-controlled growth of singlecrystalline In2O3 nanowires and their electronic properties. Adv. Mater., 15(2), 143-146.
  10. Yeo, Y.-C. (2000). Enhance Performance in Sub-100 nm CMOSFETs using Strained Epitaxial SiliconGermanium. IEDM, 00-753.
  11. Change, K.-M. (2008a). The Ge enhance the sensitivity for bio-sensor. 2nd IEEE International Nanoelectronics Conference, 811- 814.
  12. Chang, K.-M. (2008b). Higher drive current for SiGe nanowires. 2nd IEEE International Nanoelectronics Conference, 315-319.
  13. Sugiyama, N. (2004). Temperature effects on Ge condensation by thermal oxidation of SiGe-oninsulator structures. Journal of Applied Physics, 95(2), 4007-4011.
Download


Paper Citation


in Harvard Style

Chang K., Chen C., Wang Y., Liu C., Kuo J. and Lai C. (2011). ANNEALING TEMPERATURE EFFECT ON THE SENSITIVITY OF SIGE NANOWIRE FOR BIO-SENSOR . In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011) ISBN 978-989-8425-37-9, pages 345-348. DOI: 10.5220/0003153503450348


in Bibtex Style

@conference{biodevices11,
author={Kow-Ming Chang and Chu-Feng Chen and Yu-Bin Wang and Chung-Hsien Liu and Jiun-Ming Kuo and Chiung-Hui Lai},
title={ANNEALING TEMPERATURE EFFECT ON THE SENSITIVITY OF SIGE NANOWIRE FOR BIO-SENSOR},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011)},
year={2011},
pages={345-348},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0003153503450348},
isbn={978-989-8425-37-9},
}


in EndNote Style

TY - CONF
JO - Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 1: BIODEVICES, (BIOSTEC 2011)
TI - ANNEALING TEMPERATURE EFFECT ON THE SENSITIVITY OF SIGE NANOWIRE FOR BIO-SENSOR
SN - 978-989-8425-37-9
AU - Chang K.
AU - Chen C.
AU - Wang Y.
AU - Liu C.
AU - Kuo J.
AU - Lai C.
PY - 2011
SP - 345
EP - 348
DO - 10.5220/0003153503450348