Design, Ion Beam Fabrication and Test of Integrated Optical Elements

I. Bányász, S. Pelli, G. Nunzi-Conti, G. C. Righini, S. Berneschi, E. Szilágyi, A. Németh, M. Fried, P. Petrik, E. Agócs, B. Kalas, Z. Zolnai, N. Q. Khanh, I. Rajta, G. U. L. Nagy, V. Havranek, V. Vosecek, M. Veres, L. Himics

Abstract

Various methods, based on the use of ion beams, were used for the fabrication of planar and channel optical waveguides and Bragg gratings in optical crystals and glasses. Some examples of the results of these researches are presented in this review. Researches were initiated on ion beam fabrication of planar and channel optical waveguides in tellurite glasses. The ions used in the experiments were mainly helium, carbon, nitrogen and oxygen. In case of the two dimensional elements, like channel waveguides, both masked ion implantation and direct writing with ion microbeam were used. Optical microscopy (phase contrast, interference and interference contrast (INTERPHAKO), spectroscopic ellipsometry, m-line spectroscopy, Rutherford Backscattering and micro Raman spectroscopy were used to test the integrated optical elements.

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in Harvard Style

Bányász I., Pelli S., Nunzi-Conti G., Righini G., Berneschi S., Szilágyi E., Németh A., Fried M., Petrik P., Agócs E., Kalas B., Zolnai Z., Khanh N., Rajta I., Nagy G., Havranek V., Vosecek V., Veres M. and Himics L. (2018). Design, Ion Beam Fabrication and Test of Integrated Optical Elements .In Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-758-286-8, pages 279-285. DOI: 10.5220/0006679002790285


in Bibtex Style

@conference{photoptics18,
author={I. Bányász and S. Pelli and G. Nunzi-Conti and G. C. Righini and S. Berneschi and E. Szilágyi and A. Németh and M. Fried and P. Petrik and E. Agócs and B. Kalas and Z. Zolnai and N. Q. Khanh and I. Rajta and G. U. L. Nagy and V. Havranek and V. Vosecek and M. Veres and L. Himics},
title={Design, Ion Beam Fabrication and Test of Integrated Optical Elements },
booktitle={Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2018},
pages={279-285},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0006679002790285},
isbn={978-989-758-286-8},
}


in EndNote Style

TY - CONF

JO - Proceedings of the 6th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - Design, Ion Beam Fabrication and Test of Integrated Optical Elements
SN - 978-989-758-286-8
AU - Bányász I.
AU - Pelli S.
AU - Nunzi-Conti G.
AU - Righini G.
AU - Berneschi S.
AU - Szilágyi E.
AU - Németh A.
AU - Fried M.
AU - Petrik P.
AU - Agócs E.
AU - Kalas B.
AU - Zolnai Z.
AU - Khanh N.
AU - Rajta I.
AU - Nagy G.
AU - Havranek V.
AU - Vosecek V.
AU - Veres M.
AU - Himics L.
PY - 2018
SP - 279
EP - 285
DO - 10.5220/0006679002790285