Testing of Micro-optics using Digital Holographic Interferometric Microscopy

Varun Kumar, Chandra Shakher

Abstract

Digital holographic interferometric microscopy (DHIM) is used as metrological tool for the testing of micro-optics. The paper presents the measurement of sag height (h), radius of curvature (ROC), and shape of micro-lens. The advantage of using the DHIM is that the distortions due to aberrations in the optical system are avoided by the interferometric comparison of reconstructed phase with and without the object.

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Paper Citation


in Harvard Style

Kumar V. and Shakher C. (2016). Testing of Micro-optics using Digital Holographic Interferometric Microscopy . In Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS, ISBN 978-989-758-174-8, pages 140-145. DOI: 10.5220/0005742901400145


in Bibtex Style

@conference{photoptics16,
author={Varun Kumar and Chandra Shakher},
title={Testing of Micro-optics using Digital Holographic Interferometric Microscopy},
booktitle={Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,},
year={2016},
pages={140-145},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005742901400145},
isbn={978-989-758-174-8},
}


in EndNote Style

TY - CONF
JO - Proceedings of the 4th International Conference on Photonics, Optics and Laser Technology - Volume 1: PHOTOPTICS,
TI - Testing of Micro-optics using Digital Holographic Interferometric Microscopy
SN - 978-989-758-174-8
AU - Kumar V.
AU - Shakher C.
PY - 2016
SP - 140
EP - 145
DO - 10.5220/0005742901400145