Sensor Array based on Metal Oxide Semiconductors for Detecting Gas Mixtures and Its Sensing Properties

Byung-Min Kim, Jung-Sik Kim

Abstract

Metal oxide semiconductor (MOS) gas sensors are very attractive owing to their low cost simplicity of use, large number of detectable gases and various potential application fields. However, the MOS gas sensor has a serious shortcoming of low selectivity in a mixture of gases, In this study MOS micro gas sensors were fabricated for detecting carbon monoxide (CO), nitrogen oxide (NO2), ammonia (NH3) and formaldehyde (HCHO) gases, as well as their binary mixed gas systems. Four sensing materials, Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and SnO2-ZnO for HCHO were synthesized using a sol-gel method and deposited in the middle of sensor platform. The micro gas sensor platform was fabricated by using a MEMS technology. The sensing electrode and micro heater were designed to be a co-planar type structure with the Pt thin film layer. The gas sensitivity and sensing behaviour for gas mixtures suggested that the selective adsorption of one gas with respect to others occurred for gas mixture and resulted in good selectivity for a particular gas species. Furthermore, the careful pattern recognition of sensing data obtained with sensor array makes it possible to distinguish a gas species from gas mixture and to measure its concentration.

References

  1. Korotcenkov, G., 2005. Gas Response Control Through Structural and Chemical Modification of Metal Oxide Films: State of the Art and Approaches. Sens. Actuators B, Vol. 107, pp.209-232.
  2. Weimar, U., Gopel, W., 1998. Chemical Imaging. Part II: Trends in Practical Multiparameter Sensors Systems. Sens. Actuators B, Vol. 52, pp.143-161.
  3. Eranna, G, Joshi, B. C., Runthala, D. P., Gupta, R. P., 2004. Oxide Materials for Development of Integrated Gas Sensors-A Comprehensive Review. Critical Reviews in Solid State Materials Sciences, Vol. 29, pp.111-188.
  4. Zhang, S., Xie, C., Zeng, D., Li, H., Bai, Z., Cai, S., 2008. A Method of Feature Extraction from the Desorption Part of MOX's Response Curves to Gases. IEEE Sens. J., Vol. 8, pp.1816-1823.
  5. Kim, S. D., Kim, B. J., Yoon. J. H., Kim, J. S., 2007. Design, Fabrication and Characterization of a LowPower Gas Sensor with High Sensitivity to CO Gas. J. Kor. Phys. Soc., Vol. 51, pp.2069-2076.
  6. Yoon, J. H., Kim, J. S., 2009. Design and Fabrication of a MEMS-Based Gas Sensor. Adv. Mater. Res., Vol. 74, pp.255-258.
  7. Lee, H. J., Yoon, J. H., Kim, B. J., Jang, H. D., Kim, J. S. 2010. Gas Sensing Characteristics of Ru Doped-WO3 Micro Gas Sensors. Kor. J. Met. Mater., Vol. 49, pp.395-399.
  8. Kim, B. J., Lee, H. J., Yoon, J. H., Kim, J. S., 2012. Highly Sensitive Formaldehyde Gas Sensors Based on SnO2- ZnO Nanocomposites. Sens. Lett., Vol. 10, pp.1-7.
  9. Choi, W. S., Kim, B. J., Lee, H. J., Choi, J. W., Kim, S. D., Min, N. K., 2012. Study on the Micro-Heater Geometry in MEMS Gas Sensor Platforms and Effects on Gas Detecting Performances. J. Nanosci. Nanotech., Vol. 12, pp.1-4.
Download


Paper Citation


in Harvard Style

Kim B. and Kim J. (2016). Sensor Array based on Metal Oxide Semiconductors for Detecting Gas Mixtures and Its Sensing Properties . In Proceedings of the 5th International Confererence on Sensor Networks - Volume 1: SENSORNETS, ISBN 978-989-758-169-4, pages 169-174. DOI: 10.5220/0005738201690174


in Bibtex Style

@conference{sensornets16,
author={Byung-Min Kim and Jung-Sik Kim},
title={Sensor Array based on Metal Oxide Semiconductors for Detecting Gas Mixtures and Its Sensing Properties},
booktitle={Proceedings of the 5th International Confererence on Sensor Networks - Volume 1: SENSORNETS,},
year={2016},
pages={169-174},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005738201690174},
isbn={978-989-758-169-4},
}


in EndNote Style

TY - CONF
JO - Proceedings of the 5th International Confererence on Sensor Networks - Volume 1: SENSORNETS,
TI - Sensor Array based on Metal Oxide Semiconductors for Detecting Gas Mixtures and Its Sensing Properties
SN - 978-989-758-169-4
AU - Kim B.
AU - Kim J.
PY - 2016
SP - 169
EP - 174
DO - 10.5220/0005738201690174