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Authors: Hung-Lin Hsieh ; Wei-Cheng Wang and Ssu-Wen Pan

Affiliation: National Taiwan University of Science and Technology, Taiwan

Keyword(s): Displacement Measurement, Grating, Heterodyne, In-plane, Out-of-plane.

Related Ontology Subjects/Areas/Topics: Optics ; Photonics, Optics and Laser Technology ; Spectroscopy, Imaging and Metrology

Abstract: An innovative interferometer based on the heterodyne interferometry, grating shearing interferometry, and Michelson interferometry for precise displacement measurement is proposed. The system configuration is simple and easy to set-up. A heterodyne light beam is generated by using an Electro-Optic Modulating (EOM) technique for amplitude modulation. While the heterodyne light beam normally passes through a semi-transmission diffraction grating, the reflection part (Michelson interferometry) for out-of-plane displacement detection and the diffraction part (Grating interferometry) for in-plane displacement detection can then be obtained. The experimental results demonstrate the system has the capability of providing two-dimensional displacement information simultaneously. The measurement resolution and range can achieve to nanometer and millimeter levels.

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Paper citation in several formats:
Hsieh, H.; Wang, W. and Pan, S. (2013). Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements. In Proceedings of the International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS; ISBN 978-989-8565-44-0; ISSN 2184-4364, SciTePress, pages 56-62. DOI: 10.5220/0004340300560062

@conference{photoptics13,
author={Hung{-}Lin Hsieh. and Wei{-}Cheng Wang. and Ssu{-}Wen Pan.},
title={Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements},
booktitle={Proceedings of the International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS},
year={2013},
pages={56-62},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0004340300560062},
isbn={978-989-8565-44-0},
issn={2184-4364},
}

TY - CONF

JO - Proceedings of the International Conference on Photonics, Optics and Laser Technology - PHOTOPTICS
TI - Heterodyne Interferometer for In-plane and Out-of-plane Displacement Measurements
SN - 978-989-8565-44-0
IS - 2184-4364
AU - Hsieh, H.
AU - Wang, W.
AU - Pan, S.
PY - 2013
SP - 56
EP - 62
DO - 10.5220/0004340300560062
PB - SciTePress

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