Authors:
SangJoo Kwon
and
Chansik Park
Affiliation:
School of Aerospace and Mechanical Engineering, Korea Aerospace University, Korea, Republic of
Keyword(s):
Visual alignment, robotics, parallel mechanism, precision control, pattern recognition.
Related
Ontology
Subjects/Areas/Topics:
Informatics in Control, Automation and Robotics
;
Intelligent Control Systems and Optimization
;
Mechatronic Systems
;
Robot Design, Development and Control
;
Robotics and Automation
;
Vision, Recognition and Reconstruction
Abstract:
The visual alignment robot system for display and semiconductor fabrication process largely consists of multi-axes precision stage and vision peripherals. One of the central issues in a display or semiconductor mass production line is how to reduce the overall tact time by making a progress in the alignment technology between the mask and panel. In this paper, we suggest the kinematics of the 4PPR parallel alignment mechanism with four limbs unlike usual three limb cases and an effective pattern recognition algorithm for alignment mark recognition. The inverse kinematic solution determines the moving distances of joint actuators for an identified mask-panel misalignment. Also, the proposed alignment mark detection method enables considerable reduction in computation time compared with well-known pattern matching algorithms.