Authors:
J. A. Miguel
;
Y. Lechuga
and
M. Martinez
Affiliation:
University of Cantabria, Spain
Keyword(s):
MEMS Testing, Fault Injection, Fault Modelling, Finite-element Analysis, Capacitive Pressure Sensor.
Related
Ontology
Subjects/Areas/Topics:
Biomedical Engineering
;
Biomedical Instruments and Devices
;
Biomedical Sensors
;
Hardware
;
Implantable Electronics
;
MEMS
;
Microelectronics
;
Sensor Networks
Abstract:
This work explores the fault injection problem in the particular case of an implantable capacitive micro-electromechanical pressure sensor for blood-flow measurement applied to the detection of in-stent restenosis. In order to develop a MEMS testing method for this sensor and its related electronic circuitry, an accurate and realistic fault model is essential. A behavioural description of the equivalent capacitance in the fault-free case can be obtained from the analytical and numerical solutions of the deflection of a circular diaphragm under a uniformly distributed pressure. However, the deflection problem for faulty conditions due to, for example, contamination-based defects or partially released structures must be solved and modelled using finite-element analysis.