A Nano-opto-mechanical Pressure Mapping Sensor via Bragg Structure Waveguide for Biomedical Sensing

Xin Zhao

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Paper

A Nano-opto-mechanical Pressure Mapping Sensor via Bragg Structure Waveguide for Biomedical Sensing

Topics: Biomedical Sensors; MEMS; Microelectronics; Nanotechnologies

In Proceedings of the International Conference on Biomedical Electronics and Devices - Volume 0BIOSTEC, 138-143, 2015 , Lisbon, Portugal

Author: Xin Zhao

Affiliation: Sichuan University, A*STAR (Agency for Science, Technology and Research) and Nanyang Technological University, China

Keyword(s): Nano-electro-mechanical Systems, Bragg structure waveguide, mapping sensor.

Related Ontology Subjects/Areas/Topics: Biomedical Engineering ; Biomedical Instruments and Devices ; Biomedical Sensors ; Hardware ; MEMS ; Microelectronics ; Nanotechnologies ; Sensor Networks

Abstract: This paper reports a nano-opto-mechanical mapping sensor based on Bragg structure waveguide. The pressure is measured by monitoring the output spectrum shift which is induced via mechanical deformation of the period of the Bragg structure. In experiments, it measures that the shifting of the output spectra linearly red shift under different position of the Bragg structure when the pressure is increasing. Compared with traditional optical mapping sensor based on Mach-Zehnderinterferometer, the nano-opto-mechanical mapping sensor has merits such as high sensitivity and fine resolution which are 1.55pm/kPa and 1.29kPa, respectively. The nano-opto-mechanical mapping sensor has potential applications such as highly accurate measurement of pressure waves, mass sensors array and bio-medical sensors.

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Paper citation in several formats:

Zhao, X. (2015). A Nano-opto-mechanical Pressure Mapping Sensor via Bragg Structure Waveguide for Biomedical Sensing. In Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2015) - BIODEVICES; ISBN 978-989-758-071-0; ISSN 2184-4305, SciTePress, pages 138-143. DOI: 10.5220/0005274101380143

@conference{biodevices15,
author={Xin Zhao.},
title={A Nano-opto-mechanical Pressure Mapping Sensor via Bragg Structure Waveguide for Biomedical Sensing},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2015) - BIODEVICES},
year={2015},
pages={138-143},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005274101380143},
isbn={978-989-758-071-0},
issn={2184-4305},
}

TY - CONF

JO - Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2015) - BIODEVICES
TI - A Nano-opto-mechanical Pressure Mapping Sensor via Bragg Structure Waveguide for Biomedical Sensing
SN - 978-989-758-071-0
IS - 2184-4305
AU - Zhao, X.
PY - 2015
SP - 138
EP - 143
DO - 10.5220/0005274101380143
PB - SciTePress