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Authors: I. Voynarovych 1 ; R. Poehlmann 2 ; S. Schroeter 2 and M. Vlcek 1

Affiliations: 1 University of Pardubice, Czech Republic ; 2 Leibniz Institute of Photonic Technology, Germany

Keyword(s): Direct laser writing, Chalcogenide glasses, Patterned structures.

Related Ontology Subjects/Areas/Topics: Mobile Software and Services ; Optical Materials ; Optics ; Photonic and Optoelectronic Materials and Devices ; Photonics ; Photonics, Optics and Laser Technology ; Telecommunications ; Wireless Information Networks and Systems

Abstract: Direct laser writing with a continuous-wave high intensity and over-band gap laser is applied to realize surface relief optical elements in ternary As-S-Se and Ge-As-S thin chalcogenide films. The topology of created structures in dependence on the experimental conditions is investigated. Analyses indicate that the formation mechanisms of the surface patterns are thermally induced processes generated by the local heating and involve thermoplastic deformation, mass flow induced by the surface tension gradient and evaporation. Diffractive gratings with a period of 2.56 m, depths of up to 100 nm, and different periodic surface structures were patterned at the surface of 1 m thick films. The spectral dependencies of diffraction efficiency were measured and discussed.

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Paper citation in several formats:
Voynarovych, I.; Poehlmann, R.; Schroeter, S. and Vlcek, M. (2015). Fabrication of Surface Relief Optical Elements in Ternary Chalcogenide Thin Films by Direct Laser Writing. In Proceedings of the 3rd International Conference on Photonics, Optics and Laser Technology - Volume 2: PHOTOPTICS; ISBN 978-989-758-093-2; ISSN 2184-4364, SciTePress, pages 134-139. DOI: 10.5220/0005404001340139

@conference{photoptics15,
author={I. Voynarovych. and R. Poehlmann. and S. Schroeter. and M. Vlcek.},
title={Fabrication of Surface Relief Optical Elements in Ternary Chalcogenide Thin Films by Direct Laser Writing},
booktitle={Proceedings of the 3rd International Conference on Photonics, Optics and Laser Technology - Volume 2: PHOTOPTICS},
year={2015},
pages={134-139},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005404001340139},
isbn={978-989-758-093-2},
issn={2184-4364},
}

TY - CONF

JO - Proceedings of the 3rd International Conference on Photonics, Optics and Laser Technology - Volume 2: PHOTOPTICS
TI - Fabrication of Surface Relief Optical Elements in Ternary Chalcogenide Thin Films by Direct Laser Writing
SN - 978-989-758-093-2
IS - 2184-4364
AU - Voynarovych, I.
AU - Poehlmann, R.
AU - Schroeter, S.
AU - Vlcek, M.
PY - 2015
SP - 134
EP - 139
DO - 10.5220/0005404001340139
PB - SciTePress