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Authors: Toshiyuki Horiuchi ; Hiroshi Sakabe ; Takao Yuzawa and Daichi Yamamoto

Affiliation: Tokyo Denki University, Japan

Keyword(s): Micro-coil, Laser-scan lithography, Electrolytic etching, Electrode array, Bio-device

Related Ontology Subjects/Areas/Topics: Biomechanical Devices ; Biomedical Engineering ; Biomedical Instruments and Devices ; Hardware ; MEMS ; Sensor Networks

Abstract: Fabrication method of straight micro-coils of stainless steel was investigated for applying the coils to bio-measurements. As a non-magnetizable material, SUS304 stainless steel pipes with outer and inner diameters of 100 and 60 μm were used. Specimen pipes coated with positive resist films were exposed to a violet laser beam, and helical resist patterns were delineated. The pipes masked by the helical patterns were wetly etched in electrolytic etchant composed of sodium chloride, ammonium chloride, and boric acid. As a result, micro-coils with almost homogeneous widths were successfully fabricated. The calculated spring constant was in a favourable range of 0.7-2.4 N/mm. The new micro-coil fabrication method is feasible for the use of bio-device components.

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Paper citation in several formats:
Horiuchi, T.; Sakabe, H.; Yuzawa, T. and Yamamoto, D. (2013). Fabrication of Straight Stainless-Steel Micro-Coils for the Use of Biodevice Components. In Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2013) - BIODEVICES; ISBN 978-989-8565-34-1; ISSN 2184-4305, SciTePress, pages 114-119. DOI: 10.5220/0004217201140119

@conference{biodevices13,
author={Toshiyuki Horiuchi. and Hiroshi Sakabe. and Takao Yuzawa. and Daichi Yamamoto.},
title={Fabrication of Straight Stainless-Steel Micro-Coils for the Use of Biodevice Components},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2013) - BIODEVICES},
year={2013},
pages={114-119},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0004217201140119},
isbn={978-989-8565-34-1},
issn={2184-4305},
}

TY - CONF

JO - Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2013) - BIODEVICES
TI - Fabrication of Straight Stainless-Steel Micro-Coils for the Use of Biodevice Components
SN - 978-989-8565-34-1
IS - 2184-4305
AU - Horiuchi, T.
AU - Sakabe, H.
AU - Yuzawa, T.
AU - Yamamoto, D.
PY - 2013
SP - 114
EP - 119
DO - 10.5220/0004217201140119
PB - SciTePress