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Authors: Subhajit Guha ; Marco Lisker ; Andreas Trusch ; Alexander Wolf ; Chafik Meliani and Christian Wenger

Affiliation: IHP and Leibniz Institute of Innovative Microelectronic, Germany

Keyword(s): CMOS/MEMS, Lab-on-chip, Biosensor, High Frequency Bio-Sensor, CMOS Biosensor.

Related Ontology Subjects/Areas/Topics: Biomedical Engineering ; Biomedical Instruments and Devices ; Electrical Bio-Impedance ; Microelectronics

Abstract: This work presents a high frequency (X-band) CMOS dielectric sensor with hybrid microfluidic integration, applied to biosensing techniques; primarily to detect concentration of suspended particles in a solution. The detection technique is based on capacitive sensing of varying permittivity of the aqueous solution caused by different concentrations of suspended particles. The sensor chip is fabricated in 0.25 µm SiGe:C BiCMOS technology of IHP with post processed PDMS microfluidic hybrid integration. The operating frequency of the sensor is 12.3 GHz and draws a DC power of approximately 35 mW from 3 V power supply. The dielectric sensitivity of the chip was characterized and calibrated using different organic fluids (alcohols); a sensitivity of 100 MHz/permittivity was measured with the sensor. After the calibration phase, the sensor was further used to measure the concentration of glucose in a homogeneous glucose solution. Frequency down-shift of 250 MHz/10% increase in water concent ration in the homogeneous solution was observed. In order to analyse the concentration of suspended particles in a solution various concentrations of micro-beads in acetone solution were measured. Approximately a frequency up-shift of 125 MHz/10 µl increase in bead volume in acetone was observed. The overall chip size is 2.76 mm2. (More)

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Paper citation in several formats:
Guha, S.; Lisker, M.; Trusch, A.; Wolf, A.; Meliani, C. and Wenger, C. (2015). 12 GHz CMOS MEMS Lab-on-chip System for Detection of Concentration of Suspended Particles in Bio-suspensions. In Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2015) - BIODEVICES; ISBN 978-989-758-071-0; ISSN 2184-4305, SciTePress, pages 49-57. DOI: 10.5220/0005219300490057

@conference{biodevices15,
author={Subhajit Guha. and Marco Lisker. and Andreas Trusch. and Alexander Wolf. and Chafik Meliani. and Christian Wenger.},
title={12 GHz CMOS MEMS Lab-on-chip System for Detection of Concentration of Suspended Particles in Bio-suspensions},
booktitle={Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2015) - BIODEVICES},
year={2015},
pages={49-57},
publisher={SciTePress},
organization={INSTICC},
doi={10.5220/0005219300490057},
isbn={978-989-758-071-0},
issn={2184-4305},
}

TY - CONF

JO - Proceedings of the International Conference on Biomedical Electronics and Devices (BIOSTEC 2015) - BIODEVICES
TI - 12 GHz CMOS MEMS Lab-on-chip System for Detection of Concentration of Suspended Particles in Bio-suspensions
SN - 978-989-758-071-0
IS - 2184-4305
AU - Guha, S.
AU - Lisker, M.
AU - Trusch, A.
AU - Wolf, A.
AU - Meliani, C.
AU - Wenger, C.
PY - 2015
SP - 49
EP - 57
DO - 10.5220/0005219300490057
PB - SciTePress